Macos Compile UE5.2 from source failed error CS2015

I am build Unreal Engine 5.2.1 release from souce, in the platform Apple M2 Pro, macos 13.4.1 (c).
And I run GenerateProject.command and got this error(after finishing setup):

Setting up Unreal Engine project files...

Setting up bundled DotNet SDK
/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Build/BatchFiles/Mac/../../../Binaries/ThirdParty/DotNet/6.0.302/mac-arm64
Rebuilding: UnrealBuildTool assembly not found
Setting up bundled DotNet SDK
/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Build/BatchFiles/Mac/../../../Binaries/ThirdParty/DotNet/6.0.302/mac-arm64
Microsoft (R) Build Engine version 17.2.0+41abc5629 for .NET
Copyright (C) Microsoft Corporation. All rights reserved.

CSC : error CS2015: '/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/._FileUtils.cs' is a binary file instead of a text file [/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/EpicGames.Core.csproj]
CSC : error CS2015: '/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/._ReadOnlyHashSet.cs' is a binary file instead of a text file [/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/EpicGames.Core.csproj]
CSC : error CS2015: '/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/._Log.cs' is a binary file instead of a text file [/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/EpicGames.Core.csproj]
CSC : error CS2015: '/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/._CommandLineAttribute.cs' is a binary file instead of a text file [/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/EpicGames.Core.csproj]
CSC : error CS2015: '/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/._ArrayExtensions.cs' is a binary file instead of a text file [/Volumes/Untitled/UnrealEngine-5.2.0-release/Engine/Source/Programs/Shared/EpicGames.Core/EpicGames.Core.csproj]
..........
    0 Warning(s)
    103 Error(s)

Time Elapsed 00:00:01.93
Compilation failed
GenerateProjectFiles ERROR: Failed to build UnrealBuildTool

Hi, I am back with my solutions.
I think this whole things was caused by my protable SSD, I downloaded my source in it. And in the SSD, the programs behaved not to ignore the ._ files(which represents for invisible file type in macos ).

So the solustion is quiet stright:

find PATH/TO/YOUR/UE/SOURCE -type f -name '._*' -delete

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