How to compile UE5.3 source code on arm64 machine?

I download the souce code from github, it got failure after running Setup.sh:

Engine/Build/BatchFiles/Linux/GitDependencies.sh: line 20: ./Engine/Binaries/DotNET/GitDependencies/linux-x64/GitDependencies: cannot execute binary file: Exec format error
Result: 126

And i also run the osx-arm64/GitDependencies, which still generated a failure:

./Engine/Binaries/DotNET/GitDependencies/osx-arm64/GitDependencies
-bash: ./Engine/Binaries/DotNET/GitDependencies/osx-arm64/GitDependencies: cannot execute binary file: Exec format error

Please give a advice to compiling UE under ARM64.

Machine hardware: aarch64
Operating system: linux

Regards